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Spectroscopic Ellipsometry: Principles and Applications
Spectroscopic Ellipsometry: Principles and Applications
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Book Details

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE).
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  • ISBN13 9780470016084
  • ISBN10 0470016086
  • Pages 392
  • Published 2007
  • Fecha de publicación 26/01/2007
  • Language German, French
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Spectroscopic Ellipsometry: Principles and Applications
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Spectroscopic Ellipsometry: Principles and Applications (German, French)

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211,14€ 222,25€ -5%
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